Substrate processing apparatus and substrate processing method
US-11538700-B2 · Dec 27, 2022 · US
This page is not indexed by search engines while we improve data quality.
Ayabe Go patents
Ayabe Go is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ayabe Go |
| Total patents | 9 |
| First publication | Feb 2, 2017 |
| Latest publication | Dec 27, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing apparatus, substrate processing method and recording medium of performing liquid exchange processing according to liquid exchange condition
US-11282719-B2 · Mar 22, 2022 · US
Substrate processing apparatus and substrate processing method
US-2020373179-A1 · Nov 26, 2020 · US
Substrate processing apparatus and substrate processing method
US-10668494-B2 · Jun 2, 2020 · US
Substrate processing apparatus, substrate processing method and recording medium
US-2019304811-A1 · Oct 3, 2019 · US
Liquid processing apparatus
US-10046372-B2 · Aug 14, 2018 · US
Substrate processing apparatus and substrate processing method
US-2018085769-A1 · Mar 29, 2018 · US
Substrate processing apparatus, substrate transport method, and computer-readable recording medium with stored substrate transport program
US-2017062251-A1 · Mar 2, 2017 · US
Liquid processing apparatus
US-2017028450-A1 · Feb 2, 2017 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 9 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0414 | 6 |
| H01L21/67051 | 5 |
| H10P72/7618 | 4 |
| H10P72/0604 | 4 |
| H10P72/0402 | 4 |