Autonomous substrate processing system
US-12265377-B2 · Apr 1, 2025 · US
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Aji Prashant patents
Aji Prashant is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Aji Prashant |
| Total patents | 7 |
| First publication | Sep 22, 2016 |
| Latest publication | Apr 1, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Using spectroscopic measurements for substrate temperature monitoring
US-12249525-B1 · Mar 11, 2025 · US
Autonomous substrate processing system
US-2023305531-A1 · Sep 28, 2023 · US
Autonomous substrate processing system
US-11709477-B2 · Jul 25, 2023 · US
Autonomous substrate processing system
US-2022214662-A1 · Jul 7, 2022 · US
Systems and methods for enhancing inspection sensitivity of an inspection tool
US-9747520-B2 · Aug 29, 2017 · US
Systems and Methods for Enhancing Inspection Sensitivity of an Inspection Tool
US-2016275671-A1 · Sep 22, 2016 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 5 |
| Kla Tencor Corp | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0604 | 5 |
| H10P72/0461 | 5 |
| H10P72/0612 | 4 |
| H10P72/06 | 4 |
| H10P72/0454 | 4 |