Patterning a substrate using a multi-patterning technique
US-2025306463-A1 · Oct 2, 2025 · US
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Patent family 97177747
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 97177747 |
| Family type | — |
| Earliest priority | Mar 26, 2024 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2025306463A1 — Patterning a substrate using a multi-patterning technique |
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US2025306463A1 — Patterning a substrate using a multi-patterning technique (published Oct 2, 2025)
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