Plasma diagnostic device, and semiconductor processing equipment using the same
US-2025046587-A1 · Feb 6, 2025 · US
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Patent family 94387779
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 94387779 |
| Family type | — |
| Earliest priority | Aug 3, 2023 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2025046587A1 — Plasma diagnostic device, and semiconductor processing equipment using the same |
Representative publication
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US2025046587A1 — Plasma diagnostic device, and semiconductor processing equipment using the same (published Feb 6, 2025)
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