Optical sensor for film thickness measurement
US-2024418501-A1 · Dec 19, 2024 · US
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Patent family 93844287
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 93844287 |
| Family type | — |
| Earliest priority | Jun 19, 2023 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US2024418501A1 — Optical sensor for film thickness measurement |
Representative publication
Best representative member for this family based on priority and filing country.
US2024418501A1 — Optical sensor for film thickness measurement (published Dec 19, 2024)
Member publications
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Hybrid modeling for film metrology
US-2024419885-A1 · Dec 19, 2024 · US