Substrate processing apparatus and substrate processing method
US-12550658-B2 · Feb 10, 2026 · US
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Patent family 91761875
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 91761875 |
| Family type | — |
| Earliest priority | Jan 11, 2023 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12550658B2 — Substrate processing apparatus and substrate processing method |
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US12550658B2 — Substrate processing apparatus and substrate processing method (published Feb 10, 2026)
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Substrate processing apparatus and substrate processing method
US-2024234171-A1 · Jul 11, 2024 · US