Source vessel for euv
US-2024215140-A1 · Jun 27, 2024 · US
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Patent family 91583274
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 91583274 |
| Family type | — |
| Earliest priority | Dec 27, 2022 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2024215140A1 — Source vessel for euv |
Representative publication
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US2024215140A1 — Source vessel for euv (published Jun 27, 2024)
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