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Patent family 89223032

This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.

Patent family metadata
Field	Value
Family ID	89223032
Family type	—
Earliest priority	Dec 23, 2022
First filing country	US
Member publications	4
Countries	US
Representative publication	US2024213075A1 — Substrate processing device and substrate processing method

Representative publication

Best representative member for this family based on priority and filing country.

US2024213075A1 — Substrate processing device and substrate processing method (published Jun 27, 2024)

Related publications in this family.