Planarization process, apparatus and method of manufacturing an article
US-12138747-B2 · Nov 12, 2024 · US
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Patent family 88791984
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 88791984 |
| Family type | — |
| Earliest priority | May 19, 2022 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12138747B2 — Planarization process, apparatus and method of manufacturing an article |
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US12138747B2 — Planarization process, apparatus and method of manufacturing an article (published Nov 12, 2024)
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