Buried via-to-backside power rail (vbpr) for stacked field-effect transistor (fet)
US-2023369217-A1 · Nov 16, 2023 · US
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Patent family 88699459
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 88699459 |
| Family type | — |
| Earliest priority | May 10, 2022 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2023369217A1 — Buried via-to-backside power rail (vbpr) for stacked field-effect transistor (fet) |
Representative publication
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US2023369217A1 — Buried via-to-backside power rail (vbpr) for stacked field-effect transistor (fet) (published Nov 16, 2023)
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