Electrostatic chucks with self-sealing gas conduits and/or reduced clogging due to residue
US-2025062149-A1 · Feb 20, 2025 · US
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Patent family 86903579
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 86903579 |
| Family type | — |
| Earliest priority | Dec 22, 2021 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2025062149A1 — Electrostatic chucks with self-sealing gas conduits and/or reduced clogging due to residue |
Representative publication
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US2025062149A1 — Electrostatic chucks with self-sealing gas conduits and/or reduced clogging due to residue (published Feb 20, 2025)
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