Substrate polishing apparatus, substrate polishing system including the same, and substrate polishing method using the same
US-12280466-B2 · Apr 22, 2025 · US
This page is not indexed by search engines while we improve data quality.
Patent family 86055821
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 86055821 |
| Family type | — |
| Earliest priority | Oct 22, 2021 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12280466B2 — Substrate polishing apparatus, substrate polishing system including the same, and substrate polishing method using the same |
Representative publication
Best representative member for this family based on priority and filing country.
US12280466B2 — Substrate polishing apparatus, substrate polishing system including the same, and substrate polishing method using the same (published Apr 22, 2025)
Member publications
Related publications in this family.