Sputtering target, method for producing same, and method for producing sputtering film using sputtering target
US-12385126-B2 · Aug 12, 2025 · US
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Patent family 85804331
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 85804331 |
| Family type | — |
| Earliest priority | Oct 7, 2021 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12385126B2 — Sputtering target, method for producing same, and method for producing sputtering film using sputtering target |
Representative publication
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US12385126B2 — Sputtering target, method for producing same, and method for producing sputtering film using sputtering target (published Aug 12, 2025)
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