Cvd apparatus and method for cleaning chamber of cvd apparatus
US-2023069139-A1 · Mar 2, 2023 · US
This page is not indexed by search engines while we improve data quality.
Patent family 85287227
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 85287227 |
| Family type | — |
| Earliest priority | Aug 30, 2021 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2023069139A1 — Cvd apparatus and method for cleaning chamber of cvd apparatus |
Representative publication
Best representative member for this family based on priority and filing country.
US2023069139A1 — Cvd apparatus and method for cleaning chamber of cvd apparatus (published Mar 2, 2023)
Member publications
Related publications in this family.