Support unit and apparatus for treating substrate
US-12456606-B2 · Oct 28, 2025 · US
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Patent family 81992233
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 81992233 |
| Family type | — |
| Earliest priority | Dec 18, 2020 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12456606B2 — Support unit and apparatus for treating substrate |
Representative publication
Best representative member for this family based on priority and filing country.
US12456606B2 — Support unit and apparatus for treating substrate (published Oct 28, 2025)
Member publications
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Support unit and apparatus for treating substrate
US-2022199368-A1 · Jun 23, 2022 · US