Shutter apparatus and substrate treating apparatus including the same
US-12411427-B2 · Sep 9, 2025 · US
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Patent family 80469720
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 80469720 |
| Family type | — |
| Earliest priority | Sep 10, 2020 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12411427B2 — Shutter apparatus and substrate treating apparatus including the same |
Representative publication
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US12411427B2 — Shutter apparatus and substrate treating apparatus including the same (published Sep 9, 2025)
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