Apparatus for depositing thin films using hydrogen peroxide
US-11987881-B2 · May 21, 2024 · US
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Patent family 78607781
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 78607781 |
| Family type | — |
| Earliest priority | May 22, 2020 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11987881B2 — Apparatus for depositing thin films using hydrogen peroxide |
Representative publication
Best representative member for this family based on priority and filing country.
US11987881B2 — Apparatus for depositing thin films using hydrogen peroxide (published May 21, 2024)
Member publications
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Apparatus for depositing thin films using hydrogen peroxide
US-2021363633-A1 · Nov 25, 2021 · US