Substrate liquid processing apparatus and substrate liquid processing method
US-12209314-B2 · Jan 28, 2025 · US
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Patent family 75337343
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 75337343 |
| Family type | — |
| Earliest priority | Oct 2, 2019 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12209314B2 — Substrate liquid processing apparatus and substrate liquid processing method |
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US12209314B2 — Substrate liquid processing apparatus and substrate liquid processing method (published Jan 28, 2025)
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