Composition, film, method of forming film, method of forming pattern, method of forming organic-underlayer-film reverse pattern, and method of producing composition
US-12516074-B2 · Jan 6, 2026 · US
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Patent family 75166325
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 75166325 |
| Family type | — |
| Earliest priority | Sep 27, 2019 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12516074B2 — Composition, film, method of forming film, method of forming pattern, method of forming organic-underlayer-film reverse pattern, and method of producing composition |
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US12516074B2 — Composition, film, method of forming film, method of forming pattern, method of forming organic-underlayer-film reverse pattern, and method of producing composition (published Jan 6, 2026)
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