Apparatus for treating substrate
US-11923219-B2 · Mar 5, 2024 · US
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Patent family 73888459
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 73888459 |
| Family type | — |
| Earliest priority | Jun 27, 2019 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11923219B2 — Apparatus for treating substrate |
Representative publication
Best representative member for this family based on priority and filing country.
US11923219B2 — Apparatus for treating substrate (published Mar 5, 2024)
Member publications
Related publications in this family.
Apparatus for treating substrate
US-2020411344-A1 · Dec 31, 2020 · US