Laminated aerosol deposition coating for aluminum components for plasma processing chambers
US-12198902-B2 · Jan 14, 2025 · US
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Patent family 72338090
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 72338090 |
| Family type | — |
| Earliest priority | Mar 5, 2019 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12198902B2 — Laminated aerosol deposition coating for aluminum components for plasma processing chambers |
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US12198902B2 — Laminated aerosol deposition coating for aluminum components for plasma processing chambers (published Jan 14, 2025)
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