Composition comprising a siloxane and an alkane for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 NM or below
US-12518960-B2 · Jan 6, 2026 · US
This page is not indexed by search engines while we improve data quality.
Patent family 71575060
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 71575060 |
| Family type | — |
| Earliest priority | Jul 9, 2020 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12518960B2 — Composition comprising a siloxane and an alkane for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 NM or below |
Representative publication
Best representative member for this family based on priority and filing country.
US12518960B2 — Composition comprising a siloxane and an alkane for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 NM or below (published Jan 6, 2026)
Member publications
Related publications in this family.