Substrate processing method and substrate processing apparatus
US-11049723-B2 · Jun 29, 2021 · US
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Patent family 71404798
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 71404798 |
| Family type | — |
| Earliest priority | Jan 9, 2019 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11049723B2 — Substrate processing method and substrate processing apparatus |
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US11049723B2 — Substrate processing method and substrate processing apparatus (published Jun 29, 2021)
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