Substrate processing apparatus and purging method
US-11367642-B2 · Jun 21, 2022 · US
This page is not indexed by search engines while we improve data quality.
Patent family 69720029
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 69720029 |
| Family type | — |
| Earliest priority | Sep 6, 2018 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11367642B2 — Substrate processing apparatus and purging method |
Representative publication
Best representative member for this family based on priority and filing country.
US11367642B2 — Substrate processing apparatus and purging method (published Jun 21, 2022)
Member publications
Related publications in this family.
Substrate processing apparatus and purging method
US-2020083078-A1 · Mar 12, 2020 · US