Substrate liquid processing apparatus and substrate liquid processing method
US-2021317581-A1 · Oct 14, 2021 · US
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Patent family 69232154
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 69232154 |
| Family type | — |
| Earliest priority | Jul 31, 2018 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2021317581A1 — Substrate liquid processing apparatus and substrate liquid processing method |
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US2021317581A1 — Substrate liquid processing apparatus and substrate liquid processing method (published Oct 14, 2021)
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