Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-12529137-B2 · Jan 20, 2026 · US
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Patent family 69059447
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 69059447 |
| Family type | — |
| Earliest priority | Jul 5, 2018 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US12529137B2 — Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium |
Representative publication
Best representative member for this family based on priority and filing country.
US12529137B2 — Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium (published Jan 20, 2026)
Member publications
Related publications in this family.
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-2023407472-A1 · Dec 21, 2023 · US
Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device
US-11753716-B2 · Sep 12, 2023 · US
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-2021123137-A1 · Apr 29, 2021 · US