Method for forming an extreme ultraviolet lithography pellicle
US-11599019-B2 · Mar 7, 2023 · US
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Patent family 69005602
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 69005602 |
| Family type | — |
| Earliest priority | Dec 23, 2019 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11599019B2 — Method for forming an extreme ultraviolet lithography pellicle |
Representative publication
Best representative member for this family based on priority and filing country.
US11599019B2 — Method for forming an extreme ultraviolet lithography pellicle (published Mar 7, 2023)
Member publications
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Method for Forming an Extreme Ultraviolet Lithography Pellicle
US-2021191255-A1 · Jun 24, 2021 · US