Radical deactivation component, plasma processing apparatus using the same and radical deactivation method
US-11380522-B2 · Jul 5, 2022 · US
This page is not indexed by search engines while we improve data quality.
Patent family 68614011
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 68614011 |
| Family type | — |
| Earliest priority | May 25, 2018 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11380522B2 — Radical deactivation component, plasma processing apparatus using the same and radical deactivation method |
Representative publication
Best representative member for this family based on priority and filing country.
US11380522B2 — Radical deactivation component, plasma processing apparatus using the same and radical deactivation method (published Jul 5, 2022)
Member publications
Related publications in this family.