Three-dimensional memory device containing compositionally graded word line diffusion barrier layer for and methods of forming the same
US-11217532-B2 · Jan 4, 2022 · US
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Patent family 67904145
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 67904145 |
| Family type | — |
| Earliest priority | Mar 14, 2018 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US11217532B2 — Three-dimensional memory device containing compositionally graded word line diffusion barrier layer for and methods of forming the same |
Representative publication
Best representative member for this family based on priority and filing country.
US11217532B2 — Three-dimensional memory device containing compositionally graded word line diffusion barrier layer for and methods of forming the same (published Jan 4, 2022)
Member publications
Related publications in this family.
Three-dimensional memory device containing compositionally graded word line diffusion barrier layer for and methods of forming the same
US-10615123-B2 · Apr 7, 2020 · US
Three-dimensional memory device containing compositionally graded word line diffusion barrier layer for and methods of forming the same
US-2019287916-A1 · Sep 19, 2019 · US
Three-dimensional memory device containing compositionally graded word line diffusion barrier layer for and methods of forming the same
US-2019287982-A1 · Sep 19, 2019 · US