Evaporation plate for depositing deposition material on substrate, evaporation apparatus, and method of depositing deposition material on substrate
US-10658630-B2 · May 19, 2020 · US
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Patent family 66331227
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 66331227 |
| Family type | — |
| Earliest priority | Nov 1, 2017 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10658630B2 — Evaporation plate for depositing deposition material on substrate, evaporation apparatus, and method of depositing deposition material on substrate |
Representative publication
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US10658630B2 — Evaporation plate for depositing deposition material on substrate, evaporation apparatus, and method of depositing deposition material on substrate (published May 19, 2020)
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