Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
US-10844484-B2 · Nov 24, 2020 · US
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Patent family 65807275
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 65807275 |
| Family type | — |
| Earliest priority | Sep 22, 2017 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10844484B2 — Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
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US10844484B2 — Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods (published Nov 24, 2020)
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