MEMS apparatus with anti-stiction layer
US-11542151-B2 · Jan 3, 2023 · US
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Patent family 64735331
This patent family groups 6 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 64735331 |
| Family type | — |
| Earliest priority | Jun 30, 2017 |
| First filing country | US |
| Member publications | 6 |
| Countries | US |
| Representative publication | US11542151B2 — MEMS apparatus with anti-stiction layer |
Representative publication
Best representative member for this family based on priority and filing country.
US11542151B2 — MEMS apparatus with anti-stiction layer (published Jan 3, 2023)
Member publications
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