Film forming method, storage medium, and film forming system
US-11141758-B2 · Oct 12, 2021 · US
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Patent family 64656508
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 64656508 |
| Family type | — |
| Earliest priority | Jun 19, 2017 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11141758B2 — Film forming method, storage medium, and film forming system |
Representative publication
Best representative member for this family based on priority and filing country.
US11141758B2 — Film forming method, storage medium, and film forming system (published Oct 12, 2021)
Member publications
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Film forming method, storage medium, and film forming system
US-2018361428-A1 · Dec 20, 2018 · US