Process for manufacturing a microelectromechanical device with a mobile structure, in particular a micromirror
US-11440794-B2 · Sep 13, 2022 · US
This page is not indexed by search engines while we improve data quality.
Patent family 64316912
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 64316912 |
| Family type | — |
| Earliest priority | Sep 12, 2018 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11440794B2 — Process for manufacturing a microelectromechanical device with a mobile structure, in particular a micromirror |
Representative publication
Best representative member for this family based on priority and filing country.
US11440794B2 — Process for manufacturing a microelectromechanical device with a mobile structure, in particular a micromirror (published Sep 13, 2022)
Member publications
Related publications in this family.