Three-dimensional memory device containing support pillars underneath a retro-stepped dielectric material and method of making thereof
US-2018342531-A1 · Nov 29, 2018 · US
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Patent family 64315907
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 64315907 |
| Family type | — |
| Earliest priority | May 29, 2017 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US2018342531A1 — Three-dimensional memory device containing support pillars underneath a retro-stepped dielectric material and method of making thereof |
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US2018342531A1 — Three-dimensional memory device containing support pillars underneath a retro-stepped dielectric material and method of making thereof (published Nov 29, 2018)
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