Method of electrochemically processing a substrate and integrated circuit device
US-11538689-B2 · Dec 27, 2022 · US
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Patent family 62791462
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 62791462 |
| Family type | — |
| Earliest priority | Mar 23, 2018 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11538689B2 — Method of electrochemically processing a substrate and integrated circuit device |
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US11538689B2 — Method of electrochemically processing a substrate and integrated circuit device (published Dec 27, 2022)
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