Aqueous solution for resist pattern coating and pattern forming method using the same
US-2019243251-A1 · Aug 8, 2019 · US
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Patent family 62019363
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 62019363 |
| Family type | — |
| Earliest priority | Oct 19, 2016 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2019243251A1 — Aqueous solution for resist pattern coating and pattern forming method using the same |
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US2019243251A1 — Aqueous solution for resist pattern coating and pattern forming method using the same (published Aug 8, 2019)
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