Vertical fin field effect transistor with air gap spacers
US-11024709-B2 · Jun 1, 2021 · US
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Patent family 61192142
This patent family groups 10 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 61192142 |
| Family type | — |
| Earliest priority | Aug 22, 2016 |
| First filing country | US |
| Member publications | 10 |
| Countries | US |
| Representative publication | US11024709B2 — Vertical fin field effect transistor with air gap spacers |
Representative publication
Best representative member for this family based on priority and filing country.
US11024709B2 — Vertical fin field effect transistor with air gap spacers (published Jun 1, 2021)
Member publications
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