Self-aligned single dummy fin cut with tight pitch
US-10242881-B2 · Mar 26, 2019 · US
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 61160325 |
| Family type | — |
| Earliest priority | Aug 9, 2016 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US10242881B2 — Self-aligned single dummy fin cut with tight pitch |
Best representative member for this family based on priority and filing country.
US10242881B2 — Self-aligned single dummy fin cut with tight pitch (published Mar 26, 2019)
Related publications in this family.
US-10242881-B2 · Mar 26, 2019 · US
US-9947548-B2 · Apr 17, 2018 · US
US-2018082850-A1 · Mar 22, 2018 · US
US-2018047575-A1 · Feb 15, 2018 · US