Method for preparing photomask blank, photomask blank, method for preparing photomask, photomask, and metallic chromium target
US-10782608-B2 · Sep 22, 2020 · US
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Patent family 61094323
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 61094323 |
| Family type | — |
| Earliest priority | Feb 9, 2017 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10782608B2 — Method for preparing photomask blank, photomask blank, method for preparing photomask, photomask, and metallic chromium target |
Representative publication
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US10782608B2 — Method for preparing photomask blank, photomask blank, method for preparing photomask, photomask, and metallic chromium target (published Sep 22, 2020)
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