Film forming method, film forming system and surface processing method
US-10392698-B2 · Aug 27, 2019 · US
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Patent family 61071919
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 61071919 |
| Family type | — |
| Earliest priority | Aug 5, 2016 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10392698B2 — Film forming method, film forming system and surface processing method |
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US10392698B2 — Film forming method, film forming system and surface processing method (published Aug 27, 2019)
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