Method for evaluating quality of oxide semiconductor thin film, method for managing quality of oxide semiconductor thin film, and device for manufacturing semiconductor using said method for managing quality
US-10475711-B2 · Nov 12, 2019 · US
This page is not indexed by search engines while we improve data quality.
Patent family 60159767
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 60159767 |
| Family type | — |
| Earliest priority | Apr 27, 2016 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10475711B2 — Method for evaluating quality of oxide semiconductor thin film, method for managing quality of oxide semiconductor thin film, and device for manufacturing semiconductor using said method for managing quality |
Representative publication
Best representative member for this family based on priority and filing country.
US10475711B2 — Method for evaluating quality of oxide semiconductor thin film, method for managing quality of oxide semiconductor thin film, and device for manufacturing semiconductor using said method for managing quality (published Nov 12, 2019)
Member publications
Related publications in this family.