Positive resist composition and pattern forming process
US-10012902-B2 · Jul 3, 2018 · US
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Patent family 59629902
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 59629902 |
| Family type | — |
| Earliest priority | Feb 19, 2016 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10012902B2 — Positive resist composition and pattern forming process |
Representative publication
Best representative member for this family based on priority and filing country.
US10012902B2 — Positive resist composition and pattern forming process (published Jul 3, 2018)
Member publications
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Positive resist composition and pattern forming process
US-2017242339-A1 · Aug 24, 2017 · US