Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device
US-12186684-B2 · Jan 7, 2025 · US
This patent family groups 6 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 59012522 |
| Family type | — |
| Earliest priority | Dec 9, 2015 |
| First filing country | US |
| Member publications | 6 |
| Countries | US |
| Representative publication | US12186684B2 — Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device |
Best representative member for this family based on priority and filing country.
US12186684B2 — Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device (published Jan 7, 2025)
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