Method for avoiding IL regrown in a HKMG process
US-10651285-B2 · May 12, 2020 · US
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Patent family 58892007
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 58892007 |
| Family type | — |
| Earliest priority | Dec 16, 2016 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10651285B2 — Method for avoiding IL regrown in a HKMG process |
Representative publication
Best representative member for this family based on priority and filing country.
US10651285B2 — Method for avoiding IL regrown in a HKMG process (published May 12, 2020)
Member publications
Related publications in this family.
Method for avoiding il regrown in a hkmg process
US-2018175157-A1 · Jun 21, 2018 · US