Pre-coated shield using in vhf-rf pvd chambers
US-2017145553-A1 · May 25, 2017 · US
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Patent family 58720648
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 58720648 |
| Family type | — |
| Earliest priority | Nov 24, 2015 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2017145553A1 — Pre-coated shield using in vhf-rf pvd chambers |
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US2017145553A1 — Pre-coated shield using in vhf-rf pvd chambers (published May 25, 2017)
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