Self-limited planarization of hardmask
US-9640409-B1 · May 2, 2017 · US
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Patent family 58629520
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 58629520 |
| Family type | — |
| Earliest priority | Feb 2, 2016 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9640409B1 — Self-limited planarization of hardmask |
Representative publication
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US9640409B1 — Self-limited planarization of hardmask (published May 2, 2017)
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