Nozzle and substrate treating apparatus including the same
US-10005092-B2 · Jun 26, 2018 · US
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Patent family 57886320
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 57886320 |
| Family type | — |
| Earliest priority | Jul 31, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10005092B2 — Nozzle and substrate treating apparatus including the same |
Representative publication
Best representative member for this family based on priority and filing country.
US10005092B2 — Nozzle and substrate treating apparatus including the same (published Jun 26, 2018)
Member publications
Related publications in this family.
Nozzle and substrate treating apparatus including the same
US-2017028413-A1 · Feb 2, 2017 · US