Integrated elastomeric lipseal and cup bottom for reducing wafer sticking
US-10982346-B2 · Apr 20, 2021 · US
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Patent family 57730852
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 57730852 |
| Family type | — |
| Earliest priority | Jul 9, 2015 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US10982346B2 — Integrated elastomeric lipseal and cup bottom for reducing wafer sticking |
Representative publication
Best representative member for this family based on priority and filing country.
US10982346B2 — Integrated elastomeric lipseal and cup bottom for reducing wafer sticking (published Apr 20, 2021)
Member publications
Related publications in this family.
Integrated elastomeric lipseal and cup bottom for reducing wafer sticking
US-2019040544-A1 · Feb 7, 2019 · US
Integrated elastomeric lipseal and cup bottom for reducing wafer sticking
US-10053793-B2 · Aug 21, 2018 · US
Integrated elastomeric lipseal and cup bottom for reducing wafer sticking
US-2017009369-A1 · Jan 12, 2017 · US