Method for film formation, and pattern-forming method
US-9958781-B2 · May 1, 2018 · US
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Patent family 57146881
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 57146881 |
| Family type | — |
| Earliest priority | Apr 24, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9958781B2 — Method for film formation, and pattern-forming method |
Representative publication
Best representative member for this family based on priority and filing country.
US9958781B2 — Method for film formation, and pattern-forming method (published May 1, 2018)
Member publications
Related publications in this family.
Method for film formation, and pattern-forming method
US-2016314984-A1 · Oct 27, 2016 · US